Multivariate Analysis Combined with Surface Mass Spectrometry (ToF-SIMS): Enabling Problem Solving and Expanding Application Space in an Industrial Environment

摘要

Surface characterization techniques, and time-of-flight secondary ion mass spectrometry (ToF-SIMS) in particular, provide data that are multivariate in nature. Multivariate data reduction approaches can extract information and/or represent the data to facilitate interpretation of the data and correlation with measured properties. Examples discussed include multivariate curve resolution analysis of secondary ion mapping data (additive segregation in polymer resin pellets), combined positive and negative secondary ion mapping data after image registration, and secondary ion depth profiling data with depth scale correction.