Detection of electron energy distribution function anisotropy in a magnetized electron cyclotron resonance plasma by using a directional Langmuir probe

摘要

Anisotropy in the electron energy distribution function (EEDF) in an electron cyclotron resonance plasma with magnetized electrons and weakly magnetized ions is experimentally investigated using a directional Langmuir probe. Under an assumption of independent EEDFs in the directions parallel and perpendicular to the magnetic field, the directional variation of the EEDF is evaluated. In the measured EEDFs, a significantly large population density of electrons with energies larger than 30 eV is found in one of the cross-field directions depending on the magnetic field direction. With the aid of an electron trajectory calculation, it is suggested that the observed anisotropic electrons originate from the EEDF anisotropy and the cross-field electron drift.