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Phase composition of microdefects in heavily doped n-GaAs

机译:重掺杂n-GaAs中微缺陷的相组成

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摘要

The phase composition of the microdefects in Te-doped GaAs single crystals grown by the Czochralski technique with a free carrier density n_0=5 x 10~(17)-5 x 10~(18)cm~(-3) was investigated. Ga_2Te_3 phase reflections appeared in the X-ray diffraction patterns. Nonmonotonic dependences of the relative volume fraction and the coherent scattering domain size of Ga_2Te_3 on Te doping level were obtained. The possible causes of the nonmonotonic variation in the structural parameters of the Ga_2Te_3 phase with increase of Te concentration in GaAs are discussed.
机译:研究了通过Czochralski技术生长的Te掺杂GaAs单晶中微缺陷的相组成,其自由载流子密度为n_0 = 5 x 10〜(17)-5 x 10〜(18)cm〜(-3)。 Ga_2Te_3相反射出现在X射线衍射图中。获得了Ga_2Te_3的相对体积分数和相干散射域尺寸对Te掺杂水平的非单调依赖性。讨论了随着GaAs中Te浓度的增加,Ga_2Te_3相结构参数非单调变化的可能原因。

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