Fabrication and analysis of single-crystal KTiOPO4 films with thicknesses in the micrometer range

摘要

Single-crystal potassium titanyl phosphate (KTiOPO4, KTP) films with thicknesses less than 5 mu m are obtained by using helium (He) implantation combined with ionbeam-enhanced etching. A heavily damaged layer created by a 4 x 10(16) cm(-2) fluence of 2 MeV He implantation is removed by means of wet chemical etching in hydrofluoric acid (HF). Thus, free-standing films of KTP with thicknesses in the range of 3-5 mu m are obtained. The etching rate can be adjusted over a wide range by choosing temperature and HF concentration, as well as annealing conditions. Sharp etching edges and the smooth surface of the film indicate that a high selective-etching rate is achieved in the damaged layer, and the remaining part of the crystal is undamaged. X-ray and Raman-scattering results prove that KTP films have good single-crystal properties. (C) 2016 Optical Society of America