Optical constants of e-beam-deposited zirconium dioxide measured in the 55-150 angstrom wavelength region using the reflectivity technique

摘要

In the present study, optical constants of e-beam-deposited zirconium dioxide (ZrO2) thin film are determined in the 55-150 angstrom soft x-ray wavelength region using the angle-dependent reflectivity technique. Soft x-ray reflectivity measurements are carried out using the reflectivity beamline at the Indus-1 synchrotron radiation source. Derived optical constants (delta and beta) are compared with the tabulated values of Henke et al. [http://henke.lbl.gov/optical_constants/asf.html]. It is found that the measured d values are consistently lower than the tabulated bulk values in the 70-150 angstrom wavelength region. In this region, the delta values are lower by 19%-24% from the tabulated data. Below the Zr M-4 edge (66.3 angstrom), a deviation in delta values is found as similar to 2%-21%. These changes are attributed to growth-related defects (oxygen and voids) and variation in film stoichiometry. To the best of our knowledge, the present study gives the first reported experimental values of optical constants for ZrO2 in the 55-150 angstrom wavelength region. (C) 2016 Optical Society of America