Subaperture stitching tolerancing for annular ring geometry

摘要

Subaperture stitching is an economical way to extend small-region, high-resolution interferometric metrology to cover large-aperture optics. Starting from system geometry and measurement noise knowledge, this work derives an analytical expression for how noise in an annular ring of subapertures leads to large-scale errors in the computed stitched surface. These errors scale as sin (pi p/M)(-2) where p is the number of sine periods around the annular full-aperture and M is the number of subaperture measurements. Understanding how low-spatial-frequency surface errors arise from subaperture noise is necessary for tolerancing systems which use subaperture stitching. (C) 2015 Optical Society of America