Annular subaperture stitching interferometry with planar reference wavefront for measurement of spherical and aspherical surfaces

摘要

An interferometric line sensor in a Michelson configuration without a transmission sphere is employed for annular subaperture stitching interferometry to measure spherical and aspherical surfaces. The misalignments between the subapertures, which are caused by positioning error induced wavefront aberrations, are corrected employing a machine learning based Zernike polynomial fitting in the overlapping regions.