Electrochromic and optical properties of tungsten oxide films deposited with DC sputtering by introducing hydrogen

摘要

Research was undertaken to investigate the electrochromic and optical properties of tungsten oxide (WO_3) films deposited by introducing hydrogen with a direct current (DC) and pulsed DC sputtering. The results show that WO_3 films have optimum electrochromic properties at a hydrogen flow of 4 and 3 sccm for DC and pulsed DC, respectively. In the Raman spectra, the peak intensity increased with the increase of hydrogen flow at both 770 cm~1 and 950 cm~(-1) peaks, which resulted in bonds of W~(6+)-O and W~(+6) = O, respectively. Simultaneously, the transmittance (ΔT_(550 nm)) variations were 65.6% and 64.4%, and the average transmittance (ΔT_(400-500 nm)) variations were 56.7% and 56.4% for DC and pulsed DC, respectively. The bleached/colored ability of the cyclic voltammograms (CVs) was DC > pulsed DC, and the resistances of AC impedance were pulsed DC > DC.