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Influence of indium and hydrogen co-doping on optical and electrical properties of zinc oxide thin films deposited by DC magnetron sputtering

机译：铟和氢共掺杂对DC磁控溅射沉积的氧化锌薄膜光学和电性能的影响

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Nguyen Huu Truong; Tinh Van Nguyen; Tuan Anh Thanh Pham; Dung Van Hoang; Hung Minh Vu; Hoi Cong Nguyen; Thang Bach Phan; Vinh Cao Tran;
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1. Influence of addition of indium and of post-annealing on structural, electrical and optical properties of gallium-doped zinc oxide thin films deposited by direct-current magnetron sputtering [J] . Duy Phong Pham, Huu Truong Nguyen, Bach Thang Phan, Thin Solid Films . 2015,第maya29期

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2. Influence of post-annealing atmosphere on microstructure, optical and electrical properties of zinc cadmium oxide films deposited by DC and RF magnetron co-sputtering [J] . Sui Y. R., Song Y. P., Wu Y. J., CERAMICS INTERNATIONAL . 2016,第14期

机译：后退火气氛对直流和射频磁控共溅射沉积氧化锌镉薄膜的微观结构，光电性能的影响
3. Influence of post-annealing atmosphere on microstructure, optical and electrical properties of zinc cadmium oxide films deposited by DC and RF magnetron co-sputtering [J] . Sui Y. R., Song Y. P., Wu Y. J., CERAMICS INTERNATIONAL . 2016,第14期

机译：退火型气氛对DC和RF磁控膜沉积的锌氧化镉膜的微观结构，光学和电性能的影响
4. The optical, electrical and structural properties in indium zinc oxide films deposited by LF magnetron sputtering [C] . International Display Manufacturing Conference . 2006

机译：通过LF磁控溅射沉积氧化铟锌膜中的光学，电气和结构性能
5. Study of structural, electrical, optical and magnetic properties of zinc oxide based films produced by magnetron sputtering. [D] . Angelats Silva, Luis Manuel. 2007

机译：研究磁控溅射生产的氧化锌基薄膜的结构，电，光和磁性能。
6. Influence of Oxygen Concentration on the Performance of Ultra-Thin RF Magnetron Sputter Deposited Indium Tin Oxide Films as a Top Electrode for Photovoltaic Devices [O] . Jephias Gwamuri, Murugesan Marikkannan, Jeyanthinath Mayandi, 2016

机译：氧浓度对超薄射频磁控溅射沉积铟锡氧化物薄膜作为光伏器件上电极的性能的影响
7. EFFECT OF SUBSTRATE TEMPERATURE ON STRUCTURAL, OPTICAL AND ELECTRICAL PROPERTIES OF AL-DOPED ZINC OXIDE THIN FILMS DEPOSITED BY LAYER-BY-LAYER METHOD AT MAGNETRON SPUTTERING [O] . М. В. Дранчук, А. І. Євтушенко, В. А. Карпина, 2015

机译：基材温度对磁控溅射层逐层掺杂锌氧化物薄膜结构，光学和电性能的影响

Influence of indium and hydrogen co-doping on optical and electrical properties of zinc oxide thin films deposited by DC magnetron sputtering

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