This study presents a special k-type (45 deg, 135 deg) microprism structure design for the lateral-type semiconductor laser of optical systems. This study combines front- and back-side inclined exposure technology to develop a k-type microprism structure and replaces the optical prism manufactured through traditional machine processing or injection molding with a new polymer (thick-film negative photoresists) micro-optical prism structure. To obtain the optimal structural surface roughness (12-15 nm at 400 (mu)m X 400 (mu)m area), the percentage of polymer material loss caused by the solvent was controlled. This roughness level meets Blu-ray specifications (lambda/10, lambda velence 405 nm).
展开▼
