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Analysis of nanostructured porous films by measurement of adsorption isotherms with optical fiber and ellipsometry

机译:光纤和椭偏法测量吸附等温线分析纳米结构多孔膜

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摘要

An optical method to determine the nanostructure and the morphology of porous thin films is presented. This procedure is based on the response of a side-polished optical fiber with the film under study, when an adsorption-desorption cycle is carried out. Spectroscopic ellipsometry provides additional information about the optical properties and adsorption behavior of the film. Pore size distribution, anisotropy, and inhomogeneity of films can be determined by use of these two complementary techniques. To check the performances and suitability of the optical method, we have characterized a typical porous material: a TiO_(2) film deposited by evaporation. Water vapor has been used for the adsorption cycles. The well-known columnar structure of the evaporated TiO_(2) has been evidenced, and the relation between the nanostructure and the optical properties of the film is showed.
机译:提出了确定多孔薄膜纳米结构和形貌的光学方法。当进行吸附-解吸循环时,该程序基于侧面抛光的光纤对所研究薄膜的响应。椭圆偏振光谱法提供了有关膜的光学性质和吸附行为的其他信息。膜的孔径分布,各向异性和不均匀性可以通过使用这两种互补技术来确定。为了检查光学方法的性能和适用性,我们对一种典型的多孔材料进行了表征:通过蒸发沉积的TiO_(2)膜。水蒸气已经用于吸附循环。已经证明了蒸发的TiO_(2)的众所周知的柱状结构,并且显示了纳米结构与膜的光学性质之间的关系。

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