Newly development screw-type, dry vacuum pump

摘要

Ebara's new screw-type, dry vacuum pump, developed for use in semiconductor and LCD panel manufacturing processes, has been released into the market. This high-performance pump is exceptionally sturdy, corrosion-resistant, and capable of pumping out byproduct constituents of process gases. Moreover the pump configuration itself works to minimize the production of by-products inside the pump. Field tests has e confirmed that this pump is capable of continuous operation exceeding one year, as compared to the Case of a conventional pump which can only be run continuously for several months under identical conditions. The monitoring and control of this pump is computerized and various sensors equipped on the pump give warnings of minor as well as major primp operation irregularities. An optional RS232C-RS485 converter enables the primp operation to be monitored/controlled through a LAN.