Linear InGaAs SWIR Image Sensing Module

摘要

The image of infrared rays is provided with high sensitivity to thermo-object. It could be applied to defect detection of flexible printed circuit board and defect detection of wafer. As a result, infrared rays image grabbing system is a key component in the region of automatic optical inspection (AOI). The research is based on the InGaAs short-wave detector to develop linear short-wave infrared rays module. The concept of module is described to coding of firmware and software and the integration testing of software and hardware, the module is finished and presented. The spectral response is obtained by measuring of optic-electrical parameter with the InGaAs short-wave infrared rays module. After completed with lens and focusing, the object image of infrared rays is proceeding.