Ultra-High Precision Measurement and Positioning System

摘要

Institute of Physics, Academia Sinica develops scanning probe microscopy for 2 decades, which generates ultra-high precision measurement and positioning techniques. Those techniques can be custom designed for multi-axes linear, angular, rotational measurement and actuation as a core of precision instruments. In this article, we will introduce spectrometer, laser interferometer, laser auto-collimator systems for precision measurements and nano-scale positioning systems for precision positioning.