The material removal mechanism by laser micro-machining have two basic forms: pyrolysis and photolysis. The processing via photolysis removes materials in a way that photons break the interatomic bonds of the material directly, and the corresponding machining accuracy will be much higher than that via pyrolysis. The femtosecond laser has a characteristic of extremely short pulse, whose working mechanism falls in photolysis category. The research on femtosecond laser applications has not been widely carried out at present in Taiwan. This research was planned on the fundamental investigation and a comparison was made with the Nd:YVO{sub}4 laser which has been widely applied in industry.
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