CMOS MEMS Accelerometer

摘要

Presently, the CMOS MEMS and its related technologies become more and more popular. Many commercialized products have been realized using the CMOS MEMS technology. There are even more on-going researches involving in the CMOS MEMS related fields. In this article, the authors would like to introduce the design and fabrication of the CMOS MEMS accelerometers. In application, various accelerometers implemented by the authors research group in the Micro-Device Lab., National Tsing Hua University are reported. These accelerometers are fabricated using the TSMC 0.35 /an standard CMOS process plus the post-CMOS process developed by authors.