Evaluation of the elastic modulus of thin film considering the substrate effect and geometry effect of indenter tip

摘要

A method using finite element method (FEM) is proposed to evaluate the geometry effect of indenter tip on indentation behavior of film/substrate system. For the nanoindentation of film/substrate system, the power function relationship is proposed to describe the loading curve of the thin film indentation process due to substrate effect. The exponent of the power function and the maximum indentation load can reflect the geometry effect of indenter and substrate effect. In the forward analysis, FEM is used to simulate the indentation behavior of thin film with different apex angles of numerical conical indenter tip, and maximum indentation load and loading curve exponent are obtained from the numerical loading curves. Meanwhile, the dimensionless equations between the loading curve exponent, the maximum load, elastic properties of film/substrate system and apex angle of indenter are established considering substrate effect. In the reverse analysis, a nanoindentation test was performed on thin film to obtain the maximum indentation load and the loading curve exponent, and then the experimental data is substituted into the dimensionless equations. The elastic modulus of thin film and the real apex angle of indenter can be obtained by solving the dimensionless equations. The results can be helpful to the measurement of the mechanical properties of thin films by means of nanoindentation.