The Measurement Method for the Slit Strain of Copper and Copper Alloy Strip

摘要

A technological committee of JEMA made the residual stress research committee started in May, 1996.21 companies of Copper and Copper alloy maker participated in the committee. And Professor Kiuchi from Institute of Industrial Science, University of Tokyo participated. Professor Kiuchi became a chairman. We established three groups in the residual stress research committee. One of them is Board and Strip group. 11 companies participated in Board and Strip group. Each company explained the current state and the problem of the residual stress measurement, and obtained common recognition. We took up the standardization of the measurement method for the slit strain of copper and copper alloy strip. One of the measurement method for the slit strain is the method of the reference of SEMI(Semicondutor Equipment and Materials International). However, the difference was large in the method. Because, the range of the Incision length and the width of edge evaluation of hoard are wide. Then, we attended the lecture of the residual stress by professor Kiuchi. And we investigated, measured, and experimented for the slit strain. Finally, We brought the standard together in March, 1999. The difference between each companies has greatly become small by the standard.