FEM analysis of one chip quartz crystal motion sensor for detection of 1-axis angular velocity and 2-axes accelerations

摘要

In this paper, a new one-chip-style quartz crystal motion sensor is proposed, and characteristics of the sensor are analyzed by finite element method, accompanying with some analyses of vibrational characteristics. The purpose of this sensor is to monitor some human's motions. The sensor is consisted of two divisions with different functions; one is a flatly supported vibratory gyro-sensor using quartz crystal trident-type tuning fork resonator and the other is a frequency-changeable type acceleration sensor. As the results of analyses, the gyro-sensor division has a good linearity of sensitivity, although it is also a sensitive to an angular velocity which should not be detected fundamentally. This is a problem which has to be solved after. As for detection of acceleration, it is found clear that the accelerations in two directions can effectively be detected by the sensor proposed.