Cylindrical cathode-arc plasma sources for evaporation in vacuum

摘要

Problem of coating long arid large-sized products in machine-building demanded for the creation of long plasma sources. Examples of developed long cylindrical pulsed evaporators, their advantages and drawbacks are given. A new long cylindrical cathode-arc plasma source with a continuous adjustable condition of arc burning is offered and its design features are described. Modifications of evaporators with a cathode length of 500 and 1550 mm are tested.