Study of Structural Transformations at Crystallization of Thin Films of a System Ta-Si by a Method of the Coherent Optical Fourier-Analysis

摘要

The features of structure-morphology transformation at the crystallization of Ta-Si thin films are studied by the coherent optical Fourier-analysis method. Processes of the phase formation in the thin-film Ta-Si system under annealing at 917, 1078, 1223, 1307 and 1463 K are investigated. It is revealed that there are many interesting particularities of structure-morphology transformation at the crystallization of this system. It is tried to describe quantitatively these transformations.