Preparation of nanocrystalline soft magnetic FeAlN films for magnetic recording head

摘要

The nanocrystalline soft magnetic FeAlN films have been successfully prepared by RF reactive sputtering. The dependences of structure and magnetic properties on preparing conditions were investigated. The results show that the content of Al in films must be strictly controlled to attain high B{sub}s. The magnetic properties strongly depend on the temperature of the substrate during deposition and good soft magnetic properties can be found in the films sputtered at T{sub}s = 120℃. With the increase of film thickness, the saturation magnetization M{sub}s increases, In contrast to M{sub}s the coercivity H{sub}c decreases. In this paper the relations between magnetic changes and microstructure have been discussed.