Programmable pulling of uniformly alloyed silicon monocrystals out of melt

摘要

Possibility of programmable pulling of uniformlyalloyed silicon monocrystals via Chokhral'skii method isexamined. Relationships between effective distribution coefficientof silicon impurities and rate are put into base. Compariosn ofthese programs with usage of analogous programs for germaniumuniform alloying using in industrial operation is made. Numericalestimations showed that output of uniform alloying process ishigher in the case of germanium than in the case of silicon which ispulling in similar conditions.