Infrared Laser Absorption Spectroscopy with Quantum CascadeLasers in Industrial Application

摘要

Spectroscopic methods for gas analysis and plasma diagnostics in the field of the mid-infrared (MIR) spectral range were lacking in sufficient time resolution up to now, they were cumbersome and not robust enough or simply too expensive. Through quantum cascade lasers as radiation sources the application of the mid-infrared absorption spectroscopy in the industry can be revolutionized. Although the industrial use in the plasma process is still in its infancy, its enormous potential is already evident, as demonstrated by measurements on plasma etching systems in the semiconductor industry, which is impressively documented.