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Compatibility of Lithium Oxide Single Crystals with Tungsten Sputtered Films

机译:氧化锂单晶与钨溅射膜的相容性

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摘要

We examined compatibility of sputtered tungsten (W) films with lithium oxide (Li_2O, tritium breeding materials) single crystals, the surface of which were passivated by aluminum (Al), silicon (Si) or titanium (Ti) by Rutherford backscattering spectroscopy (RBS). Initial small chemical reactions were observed after heating at 573 K for 1 min in vacuum of 10~(-6) Pa for each sample. After further heat treatments from 573 K to 723 K there was no additional drastic diffusion.
机译:我们检查了溅射的钨(W)膜与氧化锂(Li_2O,breed育种材料)单晶的相容性,该单晶的表面通过卢瑟福背散射光谱法(RBS)被铝(Al),硅(Si)或钛(Ti)钝化)。每个样品在10〜(-6)Pa的真空中于573 K加热1分钟后,观察到最初的小化学反应。经过573 K至723 K的进一步热处理后,不再发生剧烈扩散。

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