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Compatibility of Lithium Titanate Fused Crystals with Tungsten Sputtered Films

机译:钛酸锂熔融晶体与钨溅射膜的相容性

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Compatibility of sputtered tungsten(W) films on lithium titanate (Li_2TiO_3, tritium breeding materials) fused crystals was examined by Rutherford backscattering spectroscopy (RBS). After heating W films on the crystals at 773 K for 1200 s in vacuum of 10~(-6) Pa, some of W atoms migrated to the Li_2TiO_3 crystals, while neither titanium(Ti) nor oxygen(O) atoms diffused into the W film. After further heating from 2400 s to 7200s, this W benavior was accelerated and both titanium(Ti) and oxygen(O) atoms diffused nto the W film.
机译:通过卢瑟福反向散射光谱法(RBS)检验了钛酸锂(Li_2TiO_3,tri繁殖材料)熔融晶体上溅射的钨(W)膜的相容性。在10〜(-6)Pa的真空下于773 K上加热晶体上的W膜1200 s后,一些W原子迁移到Li_2TiO_3晶体,而钛(Ti)和氧(O)原子均不扩散到W电影。从2400 s加热到7200s后,该W行为加速,钛(Ti)和氧(O)原子均扩散到W膜中。

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