Thermal cycling failure characteristics in air and Ar of TiN coating films by ion plating technique

摘要

Ion plating technique is a well- established technology for the production of protective coatings on a wide range of substrates. Thermal cycling failure characteristics of TiN films coated on the surface of SUS304 were examined. As a results, itwas found that the thermal characteristic of the TiN films in Ar was better than that of the films in air. Hardness of the films decreased from HV1500 to HV800 by thermal cycling test in Ar. XPS analysis revealed the existence of TiO{sub}2, after TiNfilms were oxidized during thermal cycling test in air. As the number of thermal cycling in air increased, the weight of test piece increased gradually.