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A simulation-based study on the influence of beam hardening in X-ray computed tomography for dimensional metrology

机译:基于模拟的X射线计算机断层摄影中束硬化对尺寸计量学影响的研究

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摘要

X-ray computed tomography (CT) is a radiographic scanning technique for visualising cross-sectional images of an object non-destructively. From these cross-sectional images it is possible to evaluate internal dimensional features of a workpiece which may otherwise be inaccessible to tactile and optical instruments. Beam hardening is a physical process that degrades the quality of CT images and has previously been suggested to influence dimensional measurements. Using a validated simulation tool, the influence of spectrum pre-filtration and beam hardening correction are evaluated for internal and external dimensional measurements. Beam hardening is shown to influence internal and external dimensions in opposition, and to have a greater influence on outer dimensions compared to inner dimensions. The results suggest the combination of spectrum prefiltration and a local gradient-based surface determination method are able to greatly reduce the influence of beam hardening in X-ray CT for dimensional metrology.
机译:X射线计算机断层扫描(CT)是一种射线照相扫描技术,用于无损地观察对象的横截面图像。从这些横截面图像中,可以评估工件的内部尺寸特征,否则,触觉和光学仪器将无法达到这些特征。束硬化是一种物理过程,会降低CT图像的质量,并且以前曾建议过会影响尺寸测量。使用经过验证的仿真工具,可以评估光谱预过滤和束硬化校正对内部和外部尺寸测量的影响。结果表明,束硬化会相反地影响内部和外部尺寸,并且与内部尺寸相比,对外部尺寸的影响更大。结果表明,将光谱预滤与基于局部梯度的表面确定方法相结合,可以大大减少X射线CT中束硬化对尺寸度量的影响。

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