Optical readout sensitivity of deformed microreflector for uncooled infrared detector: theoretical model and experimental validation

摘要

The authors's group proposed an optical-readout uncooled infrared detector. Primarily because of the bilayer structure of the usual such detector, deformation of the reflector is often unavoidable and seriously degrades the optical readout sensitivity. According to the theoretical analysis and experimental validation, an optical solution to this problem was established, and it was found that for the specific curvature radius, there are many characteristic reflector lengths and filter positions corresponding to the sensitivity peaks. When employing this solution, the sensitivity loss induced by the deformed reflector would be reduced to a minimum level. The strategy of this solution may also be suitable for other micromechanical devices that experience the same problem.