机译:非制冷红外探测器的光学读出灵敏度分析
CAS;
Key;
Laboratory;
of;
Mechanical;
Behavior;
and;
Design;
Materials;
University;
Science;
Technology;
China;
Hefei;
230027;
Institute;
Microelectronics;
Chinese;
Academy;
Sciences;
Beijing;
100029;
灵敏度分析; 光学读出; 非致冷红外探测器; 非制冷红外探测器; 焦平面阵列; 应力变形; 反射器; 层结构;