Micro Power Generation of a PMN-PZT Triple-morph Cantilever forElectric Harvesting Devices

摘要

A piezoelectric cantilever was manufactured using a PMN-PZT thick film for an electric harvestingdevice. In order to find better properties, we manufactured the piezoelectric cantilever in two forms(hi-morph and triple-morph); then, the hi-morph cantilever and the triple-morph cantilever werecompared as to electric micro power. The generation characteristics were investigated at variousfrequencies, load resistances, and masses. The output power of the bi-morph piezoelectric cantilevershowed a maximum value at 0.25 g mass at 197 Hz, and the triple-morph piezoelectric cantilevershowed a maximum at 0.25 g mass at 154 Hz. The piezoelectric cantilever output voltage increasedwith the increasing load resistance, and the output power quality was investigated by changing theload resistance, the mass, and the frequency. The bi-morph piezoelectric cantilevers output power at 33 id?, 0.25 g, and 197 Hz was 0.23 mW at 2.75 Vrms, and the average micro power from thetriple-morph piezoelectric cantilever was 0.432 mW at 6.57 Vrms and 154 Hz.