High-Q micro-ring resonators and grating couplers for silicon-on-insulator integrated photonic circuits

摘要

An ultra-small integrated photonic circuit has been proposed, which incorporates a high-quality-factor passive micro-ring resonator (MR) linked to a vertical grating coupler on a standard silicon-on-insulator (SOI) substrate. The experimental results demonstrate that the MR propagation loss is 0.532 dB/cm with a 10 μm radius ring resonator, the intrinsic quality factor is as high as 202.000, the waveguide grating wavelength response curve is a 1 dB bandwidth of 40 nm at 1540 nm telecommunication wavelengths, and the measured fiber-to-fiber coupling loss is 10 dB. Furthermore, the resonator wavelength temperature dependence of the 450 nm wide micro-ring resonator is 54.1 pm/°C. Such vertical grating coupler and low loss MR-integrated components greatly promote a key element in biosensors and high-speed interconnect communication applications.