Dielectric Characteristics and Orientation of Piezoelectric (PbZr_xTi_(1-x)O_3, PZT) Films Fabricated by Sol-Gel Spray and Spin Techniques

摘要

The paper presents PbZr_xTi_(1-x)O_3 (PZT) thick/thin films fabricated by spray and spin coating technologies. The PZT sol-gel is prepared by mixing PZT powder and PZT solution, and fabricated on the aluminum and nickel substrates for several layers. After drying, firing and annealing, the films were polarized by the corona poling technique. The average thicknesses of fabricated films were 3 and 10 μm for spin and spray coating techniques, respectively. The dielectric characteristics and orientation of films had been measured by LCR meter, XRD for comparison. The crystallization of the PZT structure fabricated by a spin coating technique was denser than that by a spray coating technique, especially for thicker layers. The dielectric constant increased with coating layers, and the dissipation factor decreased with coating layers. The films fabricated by a spray coating technique had better performance on these two parameters than those by the spin coating one.