Influence of the process parameters on the structural and electric properties of ferroelectric and antiferroelectric PZT thin films realized on stainless steel by a Sol-gel derived method

摘要

Pb_xZr_yTi_(1-y)O3 thin films were prepared by a modified Sol-gel method using alkoxides precursor compounds and spin-coating onto RuO2 coated stainless steel substrates.Depending on the zirconate/titanate ratio,both,ferroelectric and antiferroelectric behaviour has been obtained.Oxidation of the metal substrate due to the PZT crystallization process was studied in order to verify the influence of the heat treatment on the substrate morphology.In order to improve the properties of antiferroelectric Pb_xZr0.95Ti0.05O3,the influence of the lead excess in the composition was investigated.Thefs dependence of the switching field distribution from the annealing time and temperature,as well as the fatigue behaviour of the films,is discussed.