Electric force microscopy testing of digital voltages using the heterodyne mixing technique

摘要

Electric force microscopy (EFM) testing is a promising test technique for function and failure analysis of integrated circuits, especially in the design phase. It enables contactless, chip internal voltage measurements with simultaneous high temporal and high spatial resolution. Up to now, for EFM-testing of periodic digital voltages the sampling technique was used. Another technique-the heterodyne mixing technique-allows fast two-dimensional voltage contrast measurements, which cannot be done using the sampling technique. Thus, in this paper the suitability of the heterodyne mixing technique for the measurement of periodic digital voltages is investigated. [References: 9]