Analysis of Chain Propagation in UV Curing Using Reworkable Resin

摘要

UV curing systems are currently utilized in various industrial fields such as coatings, printing inks, adhesives, photoresist, and UV imprint lithography [1-2]. Especially, UV imprint lithography is a cost-effective high-resolution patterning technology and mainly uses multifunctional (meth)acrylates for UV curing formulations [3-5]. In UV imprint lithography, however, the photopolymerization process has not been studied up to now. Since the cured materials have a network structure and they are insoluble in solvents and infusible, it is not easy to elucidate the kinetics of photopolymerization under UV imprint conditions.