Wetting Analysis of Hydrophobic Substrate treated by HMDS Primer

摘要

The hydrophobic primer treatment is a well-known process in order to improve a micro pattern adhesion in a liquid environment. So far, in micro electronic industry, HMDS (hexamethyl-disilazane) has been employed as a typical primer source. There are various reports for the micro pattern adhesion by the primer treatment. In this paper, we focus on an ideal condition of primer treatment with HMDS. Particularly, as optimum parameters, dependency on primer time and heating temperature after primer are investigated.