Micromachined surface emitting dye laser with a self-suspended guided mode resonant grating

摘要

A micro dye laser fabricated by silicon micromachining is reported. The micro laser consists of a subwavelength grating suspended in dye liquid. The self-suspended grating is designed to work as a laser cavity based on its guided mode resonance effect. The resonant condition includes the second-order modes of the distributed feedback cavity. The proposed micro laser was fabricated by silicon micromachining. Using a liquid dye ( Rhodamine 6G), surface laser emission was obtained in a 200 mu m square region by pulsed laser pumping.