Giant magnetostrictive material can generate about 1600 ppm strain, and with the solid-state deformation principle it has the potential to render high force and precise displacement with a small volume, which makes it suitable to realize efficient miniature actuators. We have developed an inchworm linear motion mini actuator (50 x 30 x 30 mm) which is required to position an object over a range of some millimeters with nanometer resolution. An analytical model has been established for step displacement in quasi-static conditions, depending nonlinearly on both the magnetic excitation and the mechanical prestress exerted on the rod. Tests with the actuator prototype show that it can move on a flat surface with a velocity of 97.2 mu m s(-1) and a positioning resolution of up to 4 nm.
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机译：巨大的磁致伸缩材料可以产生约1600 ppm的应变，并且根据固态变形原理，它有可能以较小的体积产生高的力和精确的位移，这使其适合于实现高效的微型执行器。我们已经开发出一种尺worm蠕虫直线运动微型执行器（50 x 30 x 30 mm），需要将纳米级物体定位在几毫米的范围内。对于准静态条件下的阶跃位移，已经建立了解析模型，该模型非线性地取决于施加在杆上的磁激励和机械预应力。执行器原型的测试表明，它可以在平面上以97.2微米s（-1）的速度和高达4 nm的定位分辨率移动。
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