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首页> 外文期刊>Journal of Micromechanics and Microengineering >Oxygen-induced graphitization of amorphous carbon deposit on ohmic switch contacts improves their electrical conductivity and protects them from wear
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Oxygen-induced graphitization of amorphous carbon deposit on ohmic switch contacts improves their electrical conductivity and protects them from wear

机译:氧诱导欧姆开关触点上无定形碳沉积物的石墨化可改善其导电性并保护其免受磨损

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摘要

There has been a resurgence of interest in developing ohmic switches to complement transistors in order to address challenges associated with electrical current leakage and lowering power consumption. A critical limitation is the reliability of their electrical contacts, which are prone to wear and hydrocarbon-induced contamination. These phenomena progressively inhibit signal transmission, eventually leading to device failure. We report on progress made towards converting the contamination into a highly conductive material. We show that Pt-coated microswitch contacts operating in the presence of O_2 experience limited contaminant accumulation even in hydrocarbon-rich environments. We then demonstrate that devices that have experienced contamination can recover their original performance when operated in a clean N_2:O_2 environment. Auger and Raman spectroscopy indicate that this resistance recovery is associated with the structural transformation of the contaminant as opposed to its removal and that the transformed contaminant may shield the Pt coating from wear.
机译:为了解决与电流泄漏和降低功耗相关的挑战,开发欧姆开关以补充晶体管已经引起了人们的兴趣。一个关键的限制是它们的电触点的可靠性,容易磨损和碳氢化合物引起的污染。这些现象逐渐抑制了信号传输,最终导致设备故障。我们报告了将污染物转化为高导电材料的进展。我们显示,即使在富含烃的环境中,在O_2存在下运行的Pt涂层微动开关触点也会遇到有限的污染物积累。然后,我们证明受到污染的设备在干净的N_2:O_2环境中运行时可以恢复其原始性能。俄歇和拉曼光谱表明,这种电阻恢复与污染物的结构转变有关,而不是与污染物的去除有关,并且转变后的污染物可能会使Pt涂层免受磨损。

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