Micro-chip initiator realized by integrating Al/CuO multilayer nanothermite on polymeric membrane

摘要

We have developed a new nanothermite based polymeric electro-thermal initiator for non-contact ignition of a propellant. A reactive Al/CuO multilayer nanothermite resides on a 100 μm thick SU-8/PET (polyethyleneterephtalate) membrane to insulate the reactive layer from the silicon bulk substrate. When current is supplied to the initiator, the chemical reaction Al+CuO occurs and sparkles are spread to a distance of several millimeters. A micro-manufacturing process for fabricating the initiator is presented and the electrical behaviors of the ignition elements are also investigated. The characteristics of the initiator made on a 100 μm thick SU-8/PET membrane were compared to two bulk electro-thermal initiators: one on a silicon and one on a Pyrex substrate. The PET devices give 100% of Al/CuO ignition success for an electrical current >250 mA. Glass based reactive initiators give 100% of Al/CuO ignition success for an electrical current >500 mA. Reactive initiators directly on silicon cannot initiate even with a 4 A current. At low currents (< 1 A), the initiation time is two orders of magnitude longer for Pyrex initiator compared to those obtained for PET initiator technology. We also observed that, the Al/CuO thermite film on PET membrane reacts within 1 ms (sparkles duration) whereas it reacts within 4 ms on Pyrex. The thermite reaction is 40 times greater in intensity using the PET substrate in comparison to Pyrex.