A micromirror with CNTs hinge fabricated by the integration of CNTs film into a MEMS actuator

摘要

This paper reports a robust fabrication process to integrate carbon nanotubes (CNTs) film into a micro electromechanical systems actuator by the design and fabrication of a silicon micromirror supported by CNTs hinges. Vertically aligned single wall carbon nanotubes forest film was synthesized by water-assisted chemical vapor deposition. CNTs film was then condensed, manually maneuvered and patterned by EB lithography to form a flexible hinge of a mirror. The mirror is actuated by a electrostatic angular vertical comb actuator and the performance had been characterized. The mirror could be driven by a low voltage with a rotate angle of 1.5° and a response frequency of 500 Hz.