In conjunction with a remote-controlled smart-sensors project (Villegas M, Bildstein P and Nicole P 1997 Translateur de frequence micro-ondes pour capteur intelligent autonome Proc. 10eme Journees Nationales Microondes (St Malo, 21-23 May 1997) pp 270-1). this study concerns the validation of a radio-frequency microelectromechanical system combining micromechanical capacitive functions and microwave data communication functions. In this project. we have focused on the back-modulation function used for data re-emission. We decided to develop this function with a microelectromechanical mixer made as a passive microwave frequency shifter using an integrated silicon micromechanical capacitive structure. The principles. together with electromechanical considerations, the technology of the silicon implantation, and some first experimental results are described in this paper. The main interest lies in the characterization of the device: both electrical and mechanical properties are tested in parallel to assist us in improving the system and defining a new micromechanical frequency-translator prototype. [References: 8]
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机译：结合远程控制的智能传感器项目（Villegas M，Bildstein P和Nicole P 1997 Translateur de frequence micro-ondes pour capteur smart autonome Proc。10eme Journees Nationales Microondes（圣马洛，1997年5月21-23日），第270- 1）。这项研究涉及结合微机械电容功能和微波数据通信功能的射频微机电系统的验证。在这个项目中。我们将重点放在用于数据重新发射的反向调制功能上。我们决定使用集成了硅微机械电容结构的无源微波移频器制成的微机电混合器来开发此功能。原则。结合机电方面的考虑，介绍了硅注入技术以及一些初步的实验结果。主要兴趣在于器件的特性：并行测试电气和机械特性，以帮助我们改进系统并定义新的微机械频率转换器原型。 [参考：8]
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