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Modeling and characterization of MEMS-based piezoelectric harvesting devices

机译:基于MEMS的压电采集设备的建模与表征

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摘要

Vibrational piezoelectric harvesting devices (PHD) provide an autonomous power source for various types of sensors, actuators and MEMS devices. There have been several examples of vibrational energy harvesters published in the literature over the years. However, for many applications the generated power is not yet sufficient. In this paper, a physical model for predicting the generated electric power from piezoelectric harvesting devices is introduced. The model is based on estimating the total charge generated on a piezoelectric material when it is subjected to mechanical strain as a result of bending at the fundamental resonance frequency. Based on Euler-Bernoulli beam theory, the strain can be determined in terms of the beam deflection at purely mechanical excitation. The proposed model extends the current state of the art by consideration of the strain distribution due to the presence of an extended mass volume at the end of the beam. The constitutive equations of piezoelectricity in the sensing mode correlate the strain and the induced charge in the piezoelectric element. Using the device design parameters and the beam deflection as inputs, the power output can be calculated. The results of the model were experimentally verified for MEMS-based PHDs. The model was found to give an accurate prediction of the electrical parameters under various damping conditions. After model validation, a subsequent device optimization has been made to improve the power generation.
机译:振动压电采集设备(PHD)为各种类型的传感器,执行器和MEMS设备提供了自主电源。多年来,在文献中已经发表了一些振动能量收集器的例子。然而,对于许多应用,所产生的功率还不够。本文介绍了一种物理模型,用于预测压电采集设备产生的电能。该模型基于估算当压电材料由于在基本谐振频率下弯曲而受到机械应变时在压电材料上产生的总电荷。基于Euler-Bernoulli束理论,可以根据纯机械激发下的束挠度确定应变。所提出的模型通过考虑由于梁末端存在扩展质量体积而引起的应变分布,扩展了当前的现有技术水平。感测模式下的压电本构方程将应变与压电元件中的感应电荷相关联。使用设备设计参数和光束偏转作为输入,可以计算出功率输出。该模型的结果已针对基于MEMS的PHD进行了实验验证。发现该模型可以准确预测各种阻尼条件下的电参数。在模型验证之后,已进行了后续的设备优化以改善功率产生。

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