Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with electroplated gold on a proof mass

摘要

Performance enhancement of a silicon MEMS piezoresistive single axis accelerometer with electroplated gold/on a proof mass is presented in this paper. The fabricated accelerometer device consists of a heavy proof mass supported by four thin flexures. Boron-diffused piezoresistors located near the fixed ends of the flexures are used for sensing the developed stress and hence acceleration. Performance enhancement is achieved by electroplating a gold mass of 20 μm thickness on top of the proof mass. A commercially available sulfite-based solution TSG-250(tm) was used for the electroplating process. Aluminum metal lines were used to form a Wheatstone bridge for signal pick-up. To avoid galvanic corrosion between two dissimilar metals having contact in an electrolyte, a shadow mask technique was used to selectively deposit a Cr/Au seed layer on an insulator atop the proof mass for subsequent electrodeposition. Bulk micromachining was performed using a 5% dual-doped TMAH solution. Fabricated devices with different electroplated gold areas were tested up to ±13 g acceleration. For electroplated gold dimensions of 2500 μm × 2500 μm × 20 μm on a proof mass, sensitivity along the Z-axis is increased by 21.8% as compared to the structure without gold. Off-axis sensitivities along the X- and 7-axes are reduced by 7.6% and 6.9%, respectively.