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首页> 外文期刊>Journal of Micromechanics and Microengineering >Inkjet-printing- and electroless-plating-based fabrication of RF circuit structures on high-frequency substrates
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Inkjet-printing- and electroless-plating-based fabrication of RF circuit structures on high-frequency substrates

机译:在高频基板上基于喷墨印刷和化学镀的RF电路结构制造

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摘要

In this paper, a method to fabricate radio frequency (RF) circuit structures is described. This method involves inkjet printing of a silver nanoparticle-based ink on a functional substrate material to create the seed track (i.e., the seed layer), onto which copper is subsequently deposited by an electroless plating method, to obtain the desired thickness and conductivity of the RF structures. This process combination was validated by fabricating an S-band filter on a high-frequency substrate and comparing the RF performance of this filter with that of a filter fabricated using the conventional lithography-based method. The adhesion of the circuit structures to the substrate was qualitatively ascertained by the scotch tape test method. The performance of the inkjet-printed-electroless-plated filter was comparable to that of the conventional filter, thus proving the suitability of this novel method for practical RF applications.
机译:在本文中,描述了一种制造射频(RF)电路结构的方法。该方法涉及在功能性基底材料上喷墨印刷基于银纳米粒子的油墨,以形成种子轨道(即种子层),随后通过化学镀方法将铜沉积到该种子轨道上,以获得所需的厚度和导电率。射频结构。通过在高频基板上制造S波段滤波器并将该滤波器的RF性能与使用常规光刻技术制造的滤波器的RF性能进行比较,验证了该工艺组合。通过透明胶带测试方法定性地确定电路结构对基板的粘附性。喷墨印刷化学镀滤光片的性能可与常规滤光片相媲美,从而证明了这种新颖方法对实际RF应用的适用性。

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