Fabrication and characterization of freestanding 3D carbon microstructures using multi-exposures and resist pyrolysis

摘要

We present a fabrication method for freestanding complex 3D carbon microstructures utilizing a lithogaphy step and a heating step. We developed two fabrication methods for multi-level 3D SU-8 microstructures, which were used as polymer precursors in a carbonization process. In one method, multiple SU-8 layers were successively coated and cross-linked. In the other method, aligned partial exposures were used to control the thickness of the freestanding SU-8 layer. Freestyle, freestanding carbon microstructures were fabricated by heating 3D SU-8 microstructures below 1000 ℃ in a nitrogen atmosphere. Characterization of the pyrolysis process, through measurements such as dimensional changes, roughness, hardness, elastic modulus and resistivity, was performed for positive resists AZ5214 and AZ9260 as well as SU-8. 3D carbon microstructures fabricated using our methods can be utilized for various applications such as low cost resonating microsensors and microfluidics.