FEM based simulation of the pulsed laser ablation process in nanosecond fields

摘要

For the pulsed laser ablation in nanosecond fields, the key physical phenomenon of the removing process is thermal evaporation. For the process optimization of the nano-second laser ablation, it is essential to set up effective simulation that can reflect material absorption coefficient, energy intensity of laser, laser pulse shape, and so forth. In this research, material ablation in nano-second region is simulated by using a finite element method (FEM) commercial package and its result has been compared with experiment results focused on the difference in the ablation depth and its shape occurred after each laser pulse hitting. Finally, the effect of the parameter variation on the ablation process has been verified.