Microstructure design of HIPed TiO_2 ceramics for improved corrosion resistance

摘要

HIPed TiO2 ceramics of excellent properties have been reported recently [1-3]. Their potential appli-cations include structural components in production equipment of semiconductors. In this application, the material must withstand severe attack from various chemicals which are commonly used in the produc-tion of semiconductors. For designing a material with optimum properties, it is necessary to examine the effect of microstructure on the corrosion resistance.