CERAMIC COATING METHOD OF A CORROSION RESISTANCE MEMBER AND A CERAMIC COATED CORROSION RESISTANT MEMBER CAPABLE OF IMPROVING PLASMA RESISTANCE AND CORROSION RESISTANCE OF A CORROSION RESISTANT MEMBER

摘要

PURPOSE: A ceramic coating method of a corrosion resistance member and a ceramic coated corrosion resistant member are provided to improve the efficiency for forming an anchor in an early aerosol evaporation process by forming an amorphous alloy to the buffer layer.;CONSTITUTION: A ceramic coating method of a corrosion resistance member is as follows. An amorphous alloy is evaporated in the surface of a base material to form a buffer layer. The buffer layer is coated by ceramic with an aerosol evaporation method. The ceramic is yttria. The buffer layer is formed by one of an AD(Aerosol Deposition) method, a thermal evaporator method, and a sputtering method.;COPYRIGHT KIPO 2012